Taiwan Semi (TSMC) Announces CMOS MEMS Microphones
Buried on page 3 of this EE Times article on Taiwan Semiconductor Corporation on their 10nM prep & 16 nM tuning, we find this throwaway sentence: "In addition, it will expand its capabilities in CMOS MEMS to include MEMS microphones…" This is confirmed in TSMC's annual report in the R&D Future Major Project Summary where we find "Special SoC technology (including new NVM, MEMS, RF, analog) and 5nm transistors."